@article{yjycl2108474159157608449,
  title = {N型单晶硅制备过程控氧技术的研究综述},
  author = {杨志},
  journal = {冶金与材料},
  year = {2024},
  number = {12},
  pages = {78--80},
  issn = {2096-4854},
  url = {https://journal.zazhitong.com/yjycl/articles/2108474159157608449},
}